The national key research and development plan "8-inch silicon based piezoelectric film and piezoelectric MEMS sensor manufacturing process platform" project launch and implementation plan demonstration meeting was successfully held

Recently, the 2023 National key research and development plan "Intelligent sensor" key special "8-inch silicon based piezoelectric film and piezoelectric MEMS sensor manufacturing process platform" project launch and implementation plan demonstration meeting was successfully held in Beijing Economic and Technological Development Zone. The project is led by Cymiconics Holding subsidiary Cylex Microsystems Technology (Beijing) Co., LTD. It is jointly implemented by Wuhan University, Soochow University, Aerospace Information Innovation Institute of Chinese Academy of Sciences, Suzhou Institute of Nanotechnology and Nanobionics of Chinese Academy of Sciences, Wuhan Minsheng New Technology Co., LTD., Beijing Zhixin Microelectronics Technology Co., LTD., Chengdu Fiber Sound Technology Co., LTD., Shanghai Siluo Technology Co., LTD.

Professor Sun Daoheng of Xiamen University, Director Ouyang Jinsong of the Institute of Integrated Technical and Economic Research of Machinery Industry Instrumentation, Professor Huang Qingan of Southeast University, Researcher Ou Xin of Shanghai Institute of Microsystems and Information Technology of Chinese Academy of Sciences, Professor Yu Hongbin of Huazhong University of Science and Technology, Deputy director Luan Yan of Beijing Heyi Accounting Firm Co., Ltd. attended the expert group for the demonstration of the project implementation plan A meeting. Zhang Lei, Special Supervisor of Advanced Manufacturing and Network Project Division, High-tech Center; Zhang Ruosong, second-level Investigator of New Materials and Intelligent Manufacturing Division, Beijing Science and Technology Commission and Zhongguancun Administrative Committee; Li Yantao, Director of Integrated Circuit Special Class of Beijing Economic and Technological Development Zone; Chen Xiaonan, Secretary-General of Beijing Integrated Circuit Society; More than 40 people, including Yang Yunchun, chairman of the project lead unit, Professor Sun Chengliang of Wuhan University, project leaders and project backbone, participated in the launch meeting online and offline.

Chairman Yang Yunchun presided over the opening meeting and delivered a speech, saying that Celex Beijing undertakes this project, deeply feels the responsibility and honor and the mission is significant, and will strengthen the process management of the project, effectively provide guarantee conditions to ensure the smooth implementation of the project. Zhang Lei, special supervisor of High-tech Center, Zhang Ruosong, second-level researcher of Municipal Science and Technology Commission, and Li Yantao, director of integrated circuit special Teacher of Development Zone, delivered speeches respectively.

Afterwards, Professor Sun Daoheng, leader of the expert group, presided over the demonstration meeting of the project implementation plan. Professor Sun Chengliang, the project leader, made a detailed report on the project/project objectives and assessment indicators, important research progress, task decomposition and technical route, organization, implementation and management, and the completed work in the past six months. The leaders of each project reported their research tasks and implementation plans respectively. The expert group formed evaluation opinions through questioning and discussion, and agreed to the project team that the project research objectives were clear, the technical route was feasible, the implementation plan was reasonable, and the assessment indicators were clear. The team has a solid research foundation and sufficient industrialization conditions, which can guarantee the smooth implementation of the project. At the same time, the expert group combined the management requirements of the project, the research experience in various fields, and the needs of the client, and put forward valuable opinions and suggestions on the promotion and implementation of the project.

The successful holding of this meeting first confirmed the rationality of the implementation plan of each project, but also made the members of the project team more clear their respective division of labor and tasks, identified the key nodes and phased goals of implementation, and laid a good foundation for the smooth follow-up implementation of the project.