Product Category

A microphone is a sensor that can convert sound signals into electrical signals. MEMS microphones as small as millimeter, are generally composed of MEMS chip, ASIC chip (special integrated circuit), sound cavity, RF anti-interference circuit, etc.
MEMS microphones are widely used in consumer electronics, automotive electronics, medical devices, intelligent manufacturing and other fields due to their characteristics such as low noise, low power consumption, water resistance, dust resistance, and ability to withstand reflow soldering. They play a key role in intelligent voice interaction, noise control, sound source location and other functions, providing device manufacturers with unprecedented audio solutions.

Filter is important in RF system. The interference problem of signals can be solved by filters, both in transmitting and receiving channels, which directly affects the communication quality of signals in each frequency band. BAW filter has better performance in high frequency.
In the era of 5G and higher frequency communication, with the technical advantages of high frequency and wide band, BAW filter can provide lower insertion loss, better selectivity, higher power capacity, larger operation frequency, better electrostatic discharge protection. BAW Filter mainly includes FBAR and SMR types. FBAR has stronger filtering ability, while SMR has stronger thermal conductivity.

MEMS micromirrors is a kind of optical MEMS device, which can accurately deflect, modulate, start and terminate the lights, with high response speed, by driving the micro-mechanical structure with electrical signals.
MEMS micromirrors are important to laser beam manipulation, reducing the volume and cost of lidars, laser displayers and communication equipment and improving their accuracy. In recent years, with the development of intelligence, electrification and network connection, the automotive sensor market continues to expand. Advanced sensors based on semiconductor manufacturing processes are accelerating their applications.

MEMS accelerometers consist of the MEMS chips, ASIC chips and inertial mass, widely used in navigation and positioning, attitude perception, state monitoring, platform stability and other fields.
Under the action of externally applied acceleration, the MEMS accelerometer uses the relative position of inertial mass displacement to convert the change of acceleration into the change of capacitance, and finally obtains the change of capacitance value through the ASIC to obtain the acceleration value of object motion.

MEMS gyroscopes are a kind of device for measuring angular velocity with the Coriolis force, which is generally composed of support frame, resonant mass block and excitation and measurement unit.
MEMS gyroscopes have the advantages of low cost, small size, light weight, high reliability, digitization and repeatable mass production. They are mainly used in navigation and positioning, attitude perception, state monitoring, platform stability and other application fields.

MEMS IMUs collect inertial information such as acceleration and angular velocity, and output high-precision 3D position, velocity and attitude information in real time. They are used in attitude balance control, navigation and positioning, action execution and other aspects.
Based on semiconductor processes, MEMS-IMUs integrate the functions of multiple MEMS inertial sensors, detect displacement and rotation in 3D direction, including speed, direction, displacement and other parameters, which constitute a complete motion trajectory of objects.

Compared with traditional pressure sensors based on metal elastomer deformation, MEMS pressure sensors have smaller size and energy consumption, faster response speed. They are used very widely.
MEMS pressure sensors mainly include piezoresistive, capacitive and piezoelectric types. The main advantage of piezoresistive sensors is their high sensitivity to subtle pressure changes, enabling to perform accurate tactile perception. The main advantage of capacitive sensors are their stability and anti-interference ability.

MEMS biosensors measure biological components. The electrical current in the sensors will be changed by combing tested substances and biology molecules such as enzymes, antibodies and other types of proteins.
MEMS technology can process micro/nano level pumps, valves, pipes, vessels and others in tiny biochips, and integrate the complex functions into the chips to achieve high sensitivity, high accuracy, minimally invasive application, as well as low cost and mass production of biochips.

Infrared sensors has strong penetration ability and will not be affected by lighting conditions. In the case of low visibility such as dark night, rain and fog weather and high beam irradiation, they have good performance.
MEMS technology is used to integrate infrared emission source and detector, which has the advantages of high integration, high precision, low power consumption and fast response. The structure of MEMS infrared sensor chips is mainly a membrane supported by multiple beams, which can reduce the heat conduction.

With the development of data centers, cloud computing, 5G/6G networks and other fields, the speed, consumption and flexibility of communication systems are facing challenges. MEMS optics promotes the progress of optical network with its unique advantages.
Comparing to opto-mechanical devices, MEMS silicon photonics provides significantly faster switching speed while still providing low insertion loss, low crosstalk and wide wavelength range. MEMS photonics includes optical switches (OCSes), tunable couplers, phase shifters, ultrasound sensors and etc.